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posted on 2025-04-29, 12:05 authored by Boyuan Wei, Fengyi Guo, Fuwei Zhou, Fucong Fei, Shuai Zhang, Fengqi Songvideo of the edge of the PMMA mask being torn before it is completely dry transferred to the silicon substrate.
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- 1. DOI - Is supplement to An all-dry method for the pattern transfer during device fabrication based on organic mask
