Understanding Ferroelectricity in Sputtered Aluminum Nitride thin films on Silicon

https://doi.org/10.60893/figshare.apm.28943798

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posted on 2025-05-23, 12:03 authored by Vamshi Kiran Gogi, Christopher Chae, Abhijeet Barua, Jinwoo Hwang, RASHMI JHA

Updated supplementary material with reviewer comments

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DOI - Is supplement to Understanding Ferroelectricity in Sputtered Aluminum Nitride thin films on Silicon

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Engineering

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Ferroelectric III-V Nitrides PUND Charge Trapping

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