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posted on 2024-05-15, 11:51
authored by
John Niroula
,
Qingyun Xie
,
Nitul Rajput
,
Patrick Darmawi-Iskandar
,
Sheikh Ifatur Rahman
,
Shisong Luo
,
Rafid Palash
,
Bejoy Sikder
,
Mengyang Yuan
,
Pradyot Yadav
,
Gillian Micale
,
Nadim Chowdhury
,
Yuji Zhao
,
Siddharth Rajan
,
Tomás Palacios
See the supplementary material for more detailed information on the process flow of the TLM structures, additional electrical measurements, and additional AFM metrology done on the samples presented in this work.
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Engineering
Keywords
high temperature
GaN TLM
AFM
process flow
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CC BY 4.0
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