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posted on 2025-01-29, 13:01 authored by Timo Sommer, Rudolf Gross, Matthias Althammer, Menno Poot
In this Supplementary Material, we give details about the fabrication of the membranes, the measurement setup, and the finite-element simulations.

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    Applied Physics Letters

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    AlNMEMSoptomechanicsstressmembrane

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    CC BY-NC 4.0

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