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posted on 2025-05-27, 04:06 authored by Harshdeep Bhatia, Gregory Jursich, Christos G. Takoudis
Supplemental XPS data and dry oxygen experiments

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    JVST A: Vacuum, Surfaces, and Films

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    Keywords

    Atomic Layer DepositionTitaniaThin filmsMolecular Oxygen

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    CC BY 4.0

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