XPS Supplementary Material

Rummel, Brian; Klesko, Joseph; Meyerson, Melissa; Ohlhausen, James; Glaser, Caleb; Binder, Andrew; Dickens, Peter; Kaplar, Robert

doi:10.60893/figshare.jva.29257412.v1

XPS Supplementary Material

https://doi.org/10.60893/figshare.jva.29257412

journal contribution

posted on 2025-06-25, 12:10 authored by Brian Rummel, Joseph Klesko, Melissa Meyerson, James Ohlhausen, Caleb Glaser, Andrew Binder, Peter Dickens, Robert Kaplar

The supplementary material includes an inconclusive investigation of the ALD-Al2O3/GaN structures that highlights limitations of sputter-assisted XPS characterization for this experiment.