Supplementary information

journal contribution

posted on 2024-05-30, 11:52 authored by Marçal Blasco Solvas, Samuel Dacunha, Carlos Dominguez, Joaquin Faneca

Supplementary information for the manuscript

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DOI - Is supplement to Silicon Nitride stoichiometry tuning for visible photonic integrated components

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Engineering

Keywords

visible photonics Photonic integrated circuits Silicon nitride Autofluorescence Semiconductor fabrication

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