Supplementary Material

https://doi.org/10.60893/figshare.jva.28204973

journal contribution

posted on 2025-02-04, 13:10 authored by Botao Song, Bing Gao, Sheng Liu

Supplementary Material for the details of Baik's method employed in this study in Section S1, Figures S1-S12, and Tables SI and SII.

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DOI - Is supplement to A study on elementary gas-phase reaction kinetics and chemical vapor deposition modelling from methyltrichlorosilane

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Chemical sciences

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Methyltrichlorosilane Reaction kinetics DFT

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