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Supplementary Document

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journal contribution
posted on 2025-02-26, 13:09 authored by Shikhar Arvind, Roberto Fallica, Philippe Bezard, John Petersen, Stefan de Gendt, Esben Larsen
Supplementary document including details on the metrology techniques used and sputter times of different films during XPS depth profiling.

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    JVST A: Vacuum, Surfaces, and Films

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    Keywords

    supplementary material, AFM, FTIR, Ellipsometry

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    CC BY-NC 4.0

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