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posted on 2024-11-18, 05:01 authored by Tianyou Luo, Yinuo Zhang, Zhipeng Chen, Kaibin Xu, Peidong Ouyang, Han Hu, Chenyang Li, Yuhan Zhu, Xinyan Yi, Guoqiang Li
Supplementary Information: High-quality Temperature-complementary Bulk Acoustic Wave Resonators Fabricated with Strippable Single-crystalline AlN Films Grown on Sapphire

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    Applied Physics Letters

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    Temperature-complementaryBulk Acoustic Wave ResonatorsStrippable Single-crystalline AlN FilmsSapphire

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    CC BY-NC 4.0

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