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Supplemental Information - Silicon Implantation and Annealing in b-Ga2O3.docx (3.79 MB)

Supplement Number 1

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posted on 2024-01-05, 12:55 authored by Katie R. Gann, Naomi Pieczulewski, Cameron A. Gorsak, Karen Heinselman, Thaddeus J. Asel, Brenton A. Noesges, Kathleen T. Smith, Daniel M. Dryden, Huili Grace Xing, Hari P. Nair, David A. Muller, Michael O. Thompson
Supplemental Information document containing additional implant details, a furnace schematic, a discussion of the importance of purge times, results of annealing Ga2O3 in forming gas, contact resistance analysis, additional XRD plots, and additional STEM images.

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