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posted on 2024-02-22, 12:55 authored by AIP AdminAIP Admin, Liad Tadmor, Sofie Vandenbroucke, Eldad Bahat Treidel, Enrico Brusaterra, Paul Plate, Nicole Volkmer, Frank Brunner, Christophe Detavernier, Joachim Wü, rfl and Oliver Hilt
Supporting Information - Investigation of Atomic Layer Deposition Methods of Al2O3 on n-GaN

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    Journal of Applied Physics

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    Keywords

    Al2O3Atomic layer depositionGallium nitride

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    CC BY-NC 4.0

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