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posted on 2025-07-23, 12:23 authored by Xueli Han, Xiaorui Xu, Zhengbo Wang, Hanchao Yang, Desen Chen, Yicong Deng, Duanyang Chen, Haizhong Zhang, Hongji Qi
See the supplementary material for (Ⅰ) wafer information, (Ⅱ) simulation settings and discussion and (Ⅲ) WN deviation experiment results.

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    Applied Physics Letters

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