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posted on 2025-11-12, 13:06 authored by Simone Santucci, Amogh Kinikar, Ziwei Wang, Nandan Ruhela, Jesper Navne, Masoud Akbari, Artem Mishchenko, Mira Baraket, Maksym Plakhotnyuk
detailed info on thin film uniformity, chemical composition and high speed deposition

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    JVST A: Vacuum, Surfaces, and Films

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    Thin filmsAtomic Layer DepositionTitanium Oxide

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