AIP Publishing
Browse

Supplementary material

Download (2.29 MB)
figure
posted on 2025-11-04, 13:09 authored by Yue Zhang, Yuanwei Lin
Tables and Figures

History

Related Materials

  1. 1.
    DOI - Is supplement to <strong>Helium Assisted Plasma Etching of Indium Phosphide Ridge Waveguides at Mild Condition</strong>

Usage metrics

    JVST B: Nanotechnology and Microelectronics

    Categories

    Keywords

    Indium phosphideRidge waveguidesPlasma etchingPlasma pre-heatingHelium

    Licence

    CC BY-NC 4.0

    Exports

    RefWorks
    BibTeX
    Ref. manager
    Endnote
    DataCite
    NLM
    DC