Browse
Browse and Search
Search
File info
Supplementary material
Cite
Download
(1.86 MB)
Share
Embed
figure
posted on 2024-10-07, 04:00
authored by
Emanuela SchilirĂ²
,
Giuseppe Greco
,
Patrick Fiorenza
,
Salvatore Ethan Panasci
,
Salvatore Di Franco
,
Yvon Cordier
,
Eric Frayssinet
,
Raffaella Lo Nigro
,
Filippo Giannazzo
,
Fabrizio Roccaforte
Supporting Information
History
Usage metrics
Categories
Physical sciences
Keywords
Al2O3
Atomic Layer Deposition (ALD)
GaN
Annealing
Licence
CC BY-NC 4.0
Exports
Select an option
RefWorks
RefWorks
BibTeX
BibTeX
Ref. manager
Ref. manager
Endnote
Endnote
DataCite
DataCite
NLM
NLM
DC
DC