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Supplementary material

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posted on 2024-09-30, 04:07 authored by Eryan Gu, Jin Yan, Boxuan Li, Huilong Zhou, Zhuhui Lu, Yanwei Wen, Kun Cao, Rong Chen
Supplementary material includes WCA, AFM, XPS, and AES measurements, electrical tests, Figures S1-S10, and Tables S1-S3.

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    JVST A: Vacuum, Surfaces, and Films

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    Keywords

    Area selective depositionAtomic layer depositionatomic-scale manufacturing

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