Supplementary material

(i) Actual images of the Process Chamber that shows the Process Chamber, the Data acquisition system and the temperature controller for controlling the temperatures. I (ii) Actual image of the gas sensing set-up comprising two Dilution Chambers-Dilution Chamber 1 and Dilution Chamber 2, Process Chamber, feedback based gas sensing lines that are fed back from the two dilution chambers to the mass flow controller are also shown. In this image, the network of valves for controlling the flow of the sensing gas can also be seen. (iii) Gas sensing software comprising four different panels, viz., manual control panel, process control panel, mimic panel and measurement panel are shown.