Supplementary information
figure
posted on 2025-10-16, 12:03 authored by Sanath Kumar Honnali, Robert Boyd, Daniel Lundin, Grzegorz Greczynski, Ganpati Ramanath, Per EklundSupplementary information includes sputter yields (Table S1), two-axis XRD scans and pole figures (Figure S1), film delamination and microstructures of HiPIMS film with dc bias (Figure S2), TRIM recoil simulations (Figure S3) highlighting effects of Al⁺, Cr⁺, and Ar⁺ projectiles, two-axis XRD scans confirming w-AlN phase formation in reference film under two-stage growth (Figure S4) and cross-section scanning electron microscope images (Figure S5).
