Supplementary Materials for "Kinetics of short-range order formation in GeSn alloy: MBE vs. CVD"

The supplementary material includes more details on the computational method, diffusion path of Sn from 2F to 1H site near Ge surface, rate equation simulation for Sn accumulation in MBE, chemical potential analysis for the Sn wetting layers on Ge and the energy comparison of different surface conditions in CVD.