Supplementary Materials

The supplementary material file contains AFM images for ScAlN films discussed in the text, the microscopy image for the 100 nm Sc0.09Al0.91N film, full RSMs for the 100 nm ScAlN films, additional AFM and RSM for a 200 nm Sc0.12Al0.88N layer, and a table of the ScAlN rocking curve widths reported in the literature. The procedure followed to extract lattice constants of ScAlN films from RSMs is also included.