AIP Publishing
Browse

Supplementary Material

Download (9.08 MB)
figure
posted on 2025-07-16, 12:09 authored by Yuto Nishiwaki, Toru Utsunomiya, Takashi Ichii
S1. SEM-EDX elemental composition analysis of epoxy adhesives H74, H20E and H70E. S2. SEM-EDX analyses of microstructure and chemical composition on the Al2O3 substrate surface before and after reworking process. S3. Thermal vibration spectra measurement and AFM experiment using the refabricated sensors.

History

Usage metrics

    JVST B: Nanotechnology and Microelectronics

    Licence

    Exports

    RefWorks
    BibTeX
    Ref. manager
    Endnote
    DataCite
    NLM
    DC