posted on 2025-07-16, 12:09authored byYuto Nishiwaki, Toru Utsunomiya, Takashi Ichii
S1. SEM-EDX elemental composition analysis of epoxy adhesives H74, H20E and H70E.
S2. SEM-EDX analyses of microstructure and chemical composition on the Al2O3 substrate surface before and after reworking process.
S3. Thermal vibration spectra measurement and AFM experiment using the refabricated sensors.