Supplementary Material
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posted on 2024-11-18, 05:02 authored by Kaiyu Wang, Ke Wei, Ruizhe Zhang, sheng zhang, Jiaqi Guo, Xiaoqiang He, Jianchao Wang, Sen Huang, Yingkui Zheng, Xiaojuan chen, Xinhua Wang, Xinyu liuPulsed N2 Plasma Surface Treatment for AlGaN/GaN HEMTs Prior to PECVD SiNx Passivation to Reduce Plasma Damage
