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posted on 2024-10-31, 12:04 authored by Kyunghyeon Lee, Emma Vargo, Christopher Eom, Ricardo Ruiz, Paul Nealey
Supplementray Figure 1 and 2

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    JVST B: Nanotechnology and Microelectronics

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    Keywords

    EUV lithographyDirected self-assemblyChemical patternMetal-oxide resist

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    CC BY 4.0

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