Supplementary Material
figure
posted on 2024-08-21, 12:05 authored by Kou Ihara, Julien Cardin, Maxime Leménager, Xavier Portier, Hind Bousbia, Christophe LabbéThis supplementary material includes that a secondary ion mass spectrometry (SIMS) depth profile of samples: (S1) Reference, (S2) Lamx3, (S3) Lamx9, (S4) Atmosphere, (S5) 1nm+O3+9nm, (S6) O3 5min, (S7) O3 60 min, and Spectroscopic ellipsometry curves of Is(sin2𝛹.sinΔ) and Ic(sin2𝛹.cosΔ) measured by the UVISEL 2 ellipsometer from Jobin-Yvon Horiba at 632.8 nm wavelength, for samples: (S1) Reference, (S2) Lamx3, (S3) Lamx9, (S4) Atmosphere, (S5) 1nm+O3+9nm, (S6) O3 5min, (S7) O3 60 min.
