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posted on 2024-07-02, 11:54 authored by Michiel Wopereis, Niels Bouman, Satadal Dutta, Peter Steeneken, Farbod Alijani, Gerard Verbiest
S1: Detailed fabrication instructions S2: Frequency tuning of higher mode S3: MEMS stiffness characterization S4: Derivation of the dissipation dilution model S5: f0 vs V measurements for devices D2 and D4

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