Supplementary Material
Version 3 2024-12-17, 17:59
Version 2 2024-12-17, 17:55
Version 1 2024-07-02, 11:54
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posted on 2024-12-17, 17:59 authored by Michiel Wopereis, Niels Bouman, Satadal Dutta, Peter Steeneken, Farbod Alijani, Gerard VerbiestS1: Detailed fabrication instructions S2: Frequency tuning of higher mode S3: MEMS stiffness characterization S4: Derivation of the dissipation dilution model S5: f0 vs V measurements for devices D2 and D4<p></p>
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- 1. DOI - Is supplement to Tuning dissipation dilution in 2D material resonators by MEMS-induced tension
