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Supplementary Material

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posted on 2024-06-05, 11:51 authored by Xuepei Wang, Maokun Wu, Ting Zhang, Boyao Cui, Yu-Chun Li, Jinhao Liu, Yishan Wu, Yichen Wen, Sheng Ye, Pengpeng Ren, David Wei Zhang, Hong-Liang Lu, Runsheng Wang, ZHIGANG JI, Ru Huang

See the supplementary material for additional information on the fabrication flow of MFM ferroelectric capacitors, electric and physical characterization of ferroelectric films, XRD and XPS patterns of W and AW electrodes, and DFT theoretical analysis.