Supplementary Figure 4

c lattice parameter (gray) and BBO peak intensity normalized vs the silicon peak (red) for a) BBO3 and b) BBO3-x samples exposed to the SF6 plasma for different time. c) Rq roughness obtained measuring 5μm x 5μm AFM images of the same samples. The y-axis in panel c uses the same scaling of Fig.2 to make comparing easier.