Supplementary Figure 3

Comparison between the XPS F1s spectra before and after GCIB clean of BBO3 (a, b) and BBO3-x (c,d) samples. The first (a,c) and second (b,d) columns show the spectra for the samples exposed to SF6 for 2 and 4 minutes respectively. The dotted lines represent the 2 components in which each peak can be decomposed. The spectra before the cleaning are reported in shades of gray, while the ones after cleaning are in shades of blue (BBO3) and green (BBO3-x).