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figure

posted on 2025-01-03, 13:07 authored by Andreas Kounis-Melas, Joseph Vella, Athanassios Panagiotopoulos, David B. Graves

Etch product yields not shown in main text.

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DOI - Is supplement to Deep Potential Molecular Dynamics Simulations of Low-Temperature Plasma-Surface Interactions

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Physical sciences

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Molecular dynamics Machine learning Atomic layer etching

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