SupplementaryMaterial

figure

posted on 2025-01-03, 13:07 authored by Andreas Kounis-Melas, Joseph Vella, Athanassios Panagiotopoulos, David B. Graves

Etch product yields not shown in main text.

History

Usage metrics

Categories

Physical sciences

Keywords

Molecular dynamics Machine learning Atomic layer etching

Licence

Exports

RefWorks

BibTeX

Ref. manager

Endnote

DataCite

NLM

DC