Supplemental materials
figure
posted on 2025-06-02, 04:08 authored by Erina Kawamoto, Soichiro Matsunaga1. Aberration calculation results for magnification projection optics, 2. Relationship between the lens current of and focal length, 3. An example of
fitting a beam profile to a normal distribution, and 4. Method for calculating Msim / Mexp from the relationship between Msim and Rbeam.
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