Supplemental materials
figure
posted on 2024-10-28, 04:00 authored by Huanghuang Cheng, Jiayuan Zhou, Chao Hu, Aljoscha Söll, Zdeněk Sofer, Mingliang Tian, Xue Liu, Fan Yang, Yuxuan JiangSupplementary materials for basic characterization
of the mechanical response of sample S1 and COMSOL
simulation, additional data at other temperatures in sample S1
and S2, temperature dependence of the Q-factor in reference
SiN sample
