Supplemental Material for Raman characterization of focused ion beam fabricated lithium niobate film

See the supplementary material for the absorption spectra of the FIB thinned LN film in a wider wavelength range, which can reveal the variation of absorption spectra with ion dose. In addition, the transmission electron microscopy (TEM) images of the FIB fabricated LN and the FIB fabricated LN treated with BOE are given, which can visualize the amorphization of the LN film caused by FIB and its removal by BOE treatment.