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posted on 2025-11-13, 13:01 authored by Iliya Shiravand, Moeid Jamalzadeh, Man Nguyen, Christopher Nadeau, Miguel Manzo-Perez, Sooyeon Hwang, X. Tong, Dmytro Nykypanchuk, Matthew LaHaye, Davood Shahrjerdi
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    DOI - Is supplement to Investigation of kinetic inductance and microwave loss in thin-film TaCₓN<sub>1-x</sub> superconducting resonators

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    Applied Physics Letters

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    SuperconductivityAtomic Layer DepositionQuantum

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