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posted on 2024-10-22, 12:06 authored by Taeseung Jung, Seungyeob Kim, Sangho Lee, Jinho Ahn, Sanghun Jeon
This supplementary material includes an (S1) optical image of a microbolometer on a planar structure, (S2) modeling set-up of the performed TCAD simulation, and (S3) SEM images of LTPS.

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    JVST B: Nanotechnology and Microelectronics

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