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Supplement Number 3

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posted on 2025-05-15, 04:11 authored by Wenhui Xu, Xiaoxu Lai, Zeqi Guo, Dan Sun, Chi Chen
(a) XRD at different operating pressures. SEM images of thin films deposited at (b) 0.8 Pa, (c) 1.0 Pa, (d) 1.2 Pa

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    JVST A: Vacuum, Surfaces, and Films

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    Keywords

    Reactive sputtering, Pd decoration, VO2 thin film, H2 sensor

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    CC BY-NC 4.0

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