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posted on 2025-04-22, 12:11 authored by Jun-Hyeok Jeon, Sun Gil Kim, Hyun-Mi Kim, Hye-Young Kim, Chang-sub Park, Yong Soo Lee, Seul-Gi Kim, Hyeongkeun Kim, Jae-Boong Choi
Supplementary material provides information from Fig. S1 to S6, and table S1 which are mentioned in the manuscript.

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    JVST A: Vacuum, Surfaces, and Films

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    Atomic Layer DepositionYttrium OxidePlasma ResistanceChamber Components CoatingsYttrium Oxide Etching

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    CC BY-NC 4.0

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