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posted on 2025-01-08, 14:33 authored by Harshil Kashyap, Ping Che Lee, Kisung Chae, Matthias Passlack, Ajay Yadav, Keith Wong, Srini Nemani, Ellie Yieh, Jeffrey Spiegelman, Kyeongjae Cho, Asif Islam Khan, Andrew Kummel
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    JVST B: Nanotechnology and Microelectronics

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    Atomic layer deposition

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    CC BY 4.0

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