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Supplement Number 1

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posted on 2024-09-10, 13:13 authored by Xingyu Liu, Rongxiang Guo, Shujiao Zhang, Zunyue Zhang, Jiaqi Wang, Tie-Gen Liu, Zhenzhou Cheng
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    Applied Physics Letters

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    Keywords

    mid-infraredsilicon photonicsgrating couplersubwavelengthnanomembrane

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    CC BY 4.0

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