posted on 2024-08-01, 12:06authored byMichael McGarry, Simeon Gilbert, Luke Yates, Melissa Meyerson, Paul G. Kotula, William Bachman, Peter Sharma, Jack Flicker, Michael Siegal, Laura Biedermann
See the supplementary material for SiNx bandgap measurements, conductivity of Mo films sputtered in varying Ar/N2 environments, optical micrographs of device geometries, XRD of Mo films, additional XPS analysis of the N 1s binding environment Mo-silicide binding, a comparison of VRH and Arrhenius conductivity mechanisms, linearized J-V curves highlighting various transport regimes and temperature-dependent J-E curves.