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Supplement Number 1

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posted on 2024-07-02, 12:00 authored by Pratyasha Sahani, Shiori Nabana, Taiyu Okatani, Naoki Inomata, Yoshiaki Kanamori
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    AIP Advances

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    Keywords

    Fabry-Pérot filterMEMSGradient thicknes filterAir gap sensing

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