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posted on 2024-07-15, 04:00 authored by Nana Sun, Kazuki Okamoto, Shinnosuke Yasuoka, Soshun Doko, Naoko Matsui, Toshikazu Irisawa, Koji Tsunekawa, Takayoshi Katase, Tomoyuki Koganezawa, Tomotaka Nakatani, Rosantha Kumara, Osami Sakata, Hiroshi Funakubo
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    Applied Physics Letters

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    Ferroelectric propertyhytrogen heat-treatment(Al,Sc)N film

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    CC BY 4.0

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