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Supplementary Material.docx (10.89 MB)

Supplement Number 1

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posted on 2024-04-29, 04:00 authored by Lulu Wang, Yiwei Duo, Yijian Song, ziqiang huo, Jiankun Yang, Junxue Ran, Jianchang Yan, Junxi Wang, Jinmin Li, Tongbo Wei
See the supplementary material for the (1) morphological evolution of AlN on 3 nm h-BN without pretreatment, (2) RSM for the AlN on h-BN/sapphire, (3) thickness measurement of h-BN, (4) AFM images of h-BN with different thickness, (5) Raman spectra of h-BN with different thickness, (6) Raman spectra of h-BN with and without O2 plasma treatment, (7) XPS measurement of h-BN with and without O2 plasma treatment, (8) schematic diagram of AlN growth on h-BN/sapphire, (9) XRD characterization of AlN film before and after exfoliation, (10) KOH etching to characterize AlN film before and after exfoliation.

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