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Supplement Number 1

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posted on 2024-03-19, 11:55 authored by AIP AdminAIP Admin, Jiarui Gong
Addtional information regarding the ellipsometry measurement of ALD-Al2O3 coating, O 1s XPS spectra, and the extraction of qϕ_(S,GaN) values from XPS spectra.

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    Journal of Applied Physics

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    Keywords

    EllipsometryX-ray photoelectron spectroscopyGallium nitrideAtomic layer deposition

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    CC BY-NC 4.0

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