Supplement Number 1

figure

posted on 2024-03-19, 11:55 authored by AIP AdminAIP Admin, Jiarui Gong

Addtional information regarding the ellipsometry measurement of ALD-Al2O3 coating, O 1s XPS spectra, and the extraction of qϕ_(S,GaN) values from XPS spectra.

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1.
DOI - Is supplement to Effects of UV Ozone and O<sub>2</sub> plasma surface treatments on the band-bending of ultrathin ALD-Al<sub>2</sub>O<sub>3</sub> coated Ga-polar GaN

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Physical sciences

Keywords

Ellipsometry X-ray photoelectron spectroscopy Gallium nitride Atomic layer deposition

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