Supplement 1

The schematic fabrication process of the devices, ultraviolet photoelectron spectroscopy spectra of VO₂ and n-doped 4H-SiC, wavelength-dependent photogenerated current of the devices, SEM images of gold nanoparticles on VO₂ films, photoelectric performance as a function of optical power density for devices treated with different sizes of gold nanoparticles and FDTD simulation results of gold nanoparticles on VO₂ films.