Suppl. Figure 1 and Table 1

Suppl. Fig. 1. The results of the TLM measurement of shallow Mg and N I/I samples. / Suppl. Table 1. Sequential Mg and N I/I GaN samples used in this study. The implantation doses of Mg and N, the concentrations of Mg and cluster extracted from SIMS and APT measurements, and the CL intensity of donor-acceptor pair (DAP) and green luminescence (GL) at ~40 nm depth are listed.