SUPPLEMENTARY MATERIAL FOR Evaluation of electrical characteristics through band alignment and defect analysis of ultrathin Pt/ZrO2-Al2O3-ZrO2/TiN DRAM MIM capacitors
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posted on 2025-07-01, 12:17 authored by Suwan Lee, Junmo Kim, Beomho Won, Jiyeong Park, Ashshi Kumar, Jiye Baek, Jin Su Lee, Chang Hwa Jung, Hanjin Lim, Hyungtak SeoAdditional data and analyses supporting this study are supplementary. It includes details on X-ray diffraction (XRD) data, angle-resolved Al 2p ARXPS analysis, and temperature-dependent current-voltage (I-V) measurement data, which further support the structural and electrical characterization of the studied system.
