Process Temperature Dependence of Sputtered MgO/n-Type GaN Metal-Oxide-Semiconductor Capacitors

https://doi.org/10.60893/figshare.jap.29438045

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posted on 2025-07-22, 12:08 authored by Liron Shvilberg, Haotian Xue, Elia Palmese, Helge Heinrich, Joanne Kuan, Gabrielle Abad, Nikhil Shukla, Stephen McDonnell, Jonathan Wierer, Jon Ihlefeld

Additional XRD patterns, TEM and EDS data, loss tangent data, and UV-CV data.

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DOI - Is supplement to Process Temperature Dependence of Sputtered MgO/<em>n</em>-Type GaN Metal-Oxide-Semiconductor Capacitors

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Keywords

Metal-Oxide-Semiconductor Capacitors Electrical Characterization Process-Structure-Properties Relations

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