Impact of Al profile in high-Al content AlGaN/GaN HEMTs on the 2DEG properties

Additional details about the XRD reciprocal space maps, the surface morphology (AFM images), additional STEM images of the structures and, dislocation densities as estimated from XRD, for the studied samples. A table listing the measured and simulated Ns values according to the EDS-measured and the intended-nominal Al profiles is also provided.